Computer aided design of Langasite resonant cantilevers: analytical models and simulations
Identifieur interne : 004555 ( Main/Repository ); précédent : 004554; suivant : 004556Computer aided design of Langasite resonant cantilevers: analytical models and simulations
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Abstract
Analytical models for the piezoelectric excitation and for the wet micromachining of resonant cantilevers are proposed. Firstly, computations of metrological performances of micro-resonators allow us to select special cuts and special alignment of the cantilevers. Secondly the self-elaborated simulator TENSOSIM based on the kinematic and tensorial model furnishes etching shapes of cantilevers. As the result the number of selected cuts is reduced. Finally the simulator COMSOL® is used to evaluate the influence of final etching shape on metrological performances and especially on the resonance frequency. Changes in frequency are evaluated and deviating behaviours of structures with less favourable built-ins are tested showing that the X cut is the best cut for LGS resonant cantilevers vibrating in flexural modes (type 1 and type 2) or in torsion mode.
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Leblois</name><affiliation wicri:level="3"><inist:fA14 i1="02"><s1>MN2S Dept., FEMTO-ST Institute, 32 avenue de l'Observatoire</s1><s2>25044 Besançon</s2><s3>FRA</s3><sZ>2 aut.</sZ></inist:fA14><country>France</country><placeName><region type="region" nuts="2">Franche-Comté</region><settlement type="city">Besançon</settlement></placeName></affiliation></author><author><name sortKey="Durand, S" uniqKey="Durand S">S. 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Applied physics : (Print)</title></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Analytical method</term><term>Cantilever beam</term><term>Cavity resonator</term><term>Circuit design</term><term>Computer aided design</term><term>Engraving</term><term>Indium sulfide</term><term>Langasite</term><term>Microelectronic fabrication</term><term>Micromachining</term><term>Performance evaluation</term><term>Piezoelectric materials</term><term>Resonance frequency</term><term>Simulator</term><term>Theoretical study</term></keywords><keywords scheme="Pascal" xml:lang="fr"><term>Microusinage</term><term>Fréquence résonance</term><term>Résonateur cavité</term><term>Etude théorique</term><term>Méthode analytique</term><term>Fabrication microélectronique</term><term>Gravure</term><term>Piézoélectrique</term><term>Conception assistée</term><term>Langasite</term><term>Poutre cantilever</term><term>Evaluation performance</term><term>Simulateur</term><term>Sulfure d'indium</term><term>Conception circuit</term><term>La3Ga5SiO14</term><term>8540H</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Analytical models for the piezoelectric excitation and for the wet micromachining of resonant cantilevers are proposed. Firstly, computations of metrological performances of micro-resonators allow us to select special cuts and special alignment of the cantilevers. Secondly the self-elaborated simulator TENSOSIM based on the kinematic and tensorial model furnishes etching shapes of cantilevers. As the result the number of selected cuts is reduced. Finally the simulator COMSOL® is used to evaluate the influence of final etching shape on metrological performances and especially on the resonance frequency. Changes in frequency are evaluated and deviating behaviours of structures with less favourable built-ins are tested showing that the X cut is the best cut for LGS resonant cantilevers vibrating in flexural modes (type 1 and type 2) or in torsion mode.</div></front></TEI><inist><standard h6="B"><pA><fA01 i1="01" i2="1"><s0>1286-0042</s0></fA01><fA03 i2="1"><s0>EPJ, Appl. phys. : (Print)</s0></fA03><fA05><s2>50</s2></fA05><fA06><s2>2</s2></fA06><fA08 i1="01" i2="1" l="ENG"><s1>Computer aided design of Langasite resonant cantilevers: analytical models and simulations</s1></fA08><fA11 i1="01" i2="1"><s1>TELLIER (C. R.)</s1></fA11><fA11 i1="02" i2="1"><s1>LEBLOIS (T. 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